Demonstration of Microcantilever Biosensor Array with In-plane Photonic Transduction Mechanism
نویسندگان
چکیده
We review progress toward microcantilever arrays with in-plane photonic readout for biosensing applications. Microcantilever arrays are fabricated on individual silicon-on-insulator (SOI) chips and integrated with two-layer polydimethylsiloxane (PDMS) microfluidics that incorporate fluid channels and valves. Microcantilever functionalization is accomplished by inkjetting appropriate fluids onto one side of each cantilever. Preliminary biosensing results using the streptavidin-biotin model system are discussed.
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